Modeling and experimental analysis of GaN MOVPE in AIX 200 RF reactor | Talalaev | EWMOVPEX. 10th European Workshop on Metalorganic Vapour Phase Epitaxy

Modeling and experimental analysis of GaN MOVPE in AIX 200 RF reactor

R.A. Talalaev, E.V. Yakovlev, Yu.N. Makarov, B.S. Yavich, W.N. Wang

DOI Code: 10.1285/i9788883050088p275

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